Abstract
Flow sensors inspired by the natural hair sensing mechanism have great prospect in the research of micro-autonomous system and technology (MAST) for the three-dimensional structure characteristics with high spatial and quality utilization. A novel bio-inspired hair flow sensor (BHFS) based on resonant sensing with a unique asymmetric design is presented in this paper. A hair transducer and a signal detector which is constituted of a two-stage micro-leverage mechanism and two symmetrical resonators (double ended tuning fork, DETF) are adopted to realize the high sensitivity to air flow. The sensitivity of the proposed BHFS is improved significantly than the published ones due to the high sensitivity of resonators and the higher amplification factor possessed by the two-stage micro-leverage mechanism. The standard deep dry silicon on glass (DDSOG) process is chosen to fabricate the proposed BHFS. The experiment result demonstrates that the fabricated BHFS has a mechanical sensitivity of 5.26 Hz/(m/s)2 at a resonant frequency of 22 kHz with the hair height of 6 mm.
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