Abstract
The bionic cilium MEMS vector hydrophone has the characteristics of low power consumption, small volume, and good low-frequency response. Nevertheless, there exists the problem of left–right ambiguity in the azimuth estimation of a single hydrophone. In order to solve the engineering application problem, a sound-pressure sound-pressure-gradient hydrophone is designed in this paper. The new composite hydrophone consists of two channels. The bionic cilium microstructure is optimized and used as the vector channel, to collect the sound pressure gradient information, and a scalar channel, based on a piezoelectric ceramic tube, is added, to receive the sound pressure information. The theoretical analysis, simulation analysis, and test analysis of the composite hydrophone are carried out, respectively. The test results show that the sensitivities of the hydrophone can reach up to −188 dB (vector channel) and −204 dB (scalar channel). The problem of left–right ambiguity is solved by combining the sound pressure and sound pressure gradient in different ways. This is of great significance in the engineering application of single cilium MEMS hydrophone orientation.
Highlights
For cilium MEMS vector hydrophone (CVH), there exists the problem of left–right ambiguity in the azimuth estimation of a single hydrophone
The sensor micro-structure of the vector channel consists of the following three parts: The sensor micro-structure of the vector channel consists of the following three par four cantilever beams, central block, and cilium
Cilium is made of PE, and the beamscantilever and centerbeams, block arecentral fabricated by silicon
Summary
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. With the development of underwater acoustic technology, many hydrophones, based on different principles, have been designed [1,2,3,4,5], such as the fiber laser hydrophone, piezocomposite hydrophone, and electromagnetic hydrophone, etc. H et al proposed a compact fiber-optic hydrophone and used it for acoustic wave measurements [6]. JH et al presented an experimental investigation of a water pipeline leak detection system, based on a low-cost, tiny-sized hydrophone sensor that was fabricated using the MEMS technologies [7]. A molecular-electronic hydrophone, with a frequency range of
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