Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope

Abstract

A MEMS gyroscope is a critical sensor in attitude control platforms and inertial navigation systems, which has the advantages of small size, light weight, low energy consumption, high reliability and strong anti-interference capability. This paper presents the design, simulation and fabrication of a Y-axis gyroscope with out-of-plane detection developed using CMOS-MEMS technology. The structural dimensions of the gyroscope were optimized through a multi-objective genetic algorithm, and modal, harmonic response and range simulation analyses were carried out to verify the reasonableness of the design. The chip measured 1.2 mm × 1.3 mm. The simulation results indicate that the driving and detecting frequencies of the gyroscope were 9215.5 Hz and 9243.5 Hz, respectively; the Q-factors were 83,790 and 46,085; the mechanical sensitivity was 4.87 × 10−11 m/°/s; and the operational range was ±600°/s. Chip testing shows that the static capacitance was consistent with the preset value. The error between the measured frequency characteristics and the simulation results was 1.9%. This design establishes a foundation for the integration of the gyroscope’s structure and circuitry.