Design and fabrication of piezoelectric nanocomposite structures for microdevice applications

Arvydas Palevičius ,Sigita Ponelyte,Asta Guobiené ,Igoris Prosyčevas ,Judita Puišo ,Rokas Šakalys

doi:10.1117/1.jmm.12.4.043004

Arvydas Palevičius , Sigita Ponelyte + Show 4 more

Open Access

https://doi.org/10.1117/1.jmm.12.4.043004

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Abstract

We present a new group of piezoelectric nanocomposite thin films based on integrating piezoelectric material poly(vinylidene fluoride) and nanoparticles of barium titanate in a matrix of an organic polymer poly(methyl methacrylate). Implementation of piezoelectric properties in designed new nanocomposites allows us not only to increase the sensitivity and functionality of the overall system, where this material is used, but also to expand the application fields in sensing and actuating systems. Results implied that new nanostructures fabricated by nanoimprint lithography exhibit good piezoelectric, surface, and mechanical properties and allow independent control of tribological properties. Formed nanocomposite systems were integrated in designing optical components employed in medicine for sensing applications.

Highlights

Due to the large motions that can be generated with low hysteresis and high-available energy densities, piezoelectric structures offer many benefits in microsystems
Synthesizing poly(vinylidene) fluoride (PVDF) with polymer poly(methyl methacrylate) (PMMA) is an original way to force PVDF to crystallize into the piezoelectric phase, which is thermodynamically unstable in a pure material
Since the diffraction efficiencies in 0 and Æ1 orders of its maximum are of most importance, it may be concluded that periodical microstructures imprinted on PVDF–PMMA and PVDF–PMMA–BaTiO3 thin films were of different forms and parameters to the master grating which lead to very good diffraction efficiency results, i.e., diffracted energy mainly concentrated in its zero and first orders of its maximum

Summary

Introduction

Due to the large motions that can be generated with low hysteresis and high-available energy densities, piezoelectric structures offer many benefits in microsystems. Piezoelectric materials distinguish themselves with a high bandwidth, high frequency, low-power requirements, fast response, and highgenerative forces They may be used as actuators or as sensors, i.e., property of reversibility.[12] As an actuation mechanism, they may be highly resistive to humidity, temperature, or other environmental effects. Certain research in the field of sensing applications, like in medicine, face problems such as shortcoming of sensitivity, good surface morphology, and mechanical and optical properties of designed components.[11,12] This article covers the development of novel nanoimprinted thin vibrating components based on novel nanocomposite materials with a unique combination of properties. Research done on PVDF is related to investigations of composites of piezoelectric materials, PVDF and ceramics Results of these investigations have shown that designed novel piezoelectric ceramic–polymer nanocomposites PVDF–BaTiO3 and PVDF–PMMA–BaTiO3 possess exceptional surface morphology and mechanical and piezoelectric properties. The implementation of piezoelectric properties in nanocomposites allows us to increase the sensitivity and functionality of the overall system, and to expand the application fields in sensing and actuating

Experimental Details

Nanocomposite Synthesis

Technological Aspects

Results and Discussion

Conclusions