Abstract
A good designed MEMS microphone is very important for attaining good characteristics of sensitivity and frequency bandwidth with flat response. So we performed multi-physics finite element analysis that can predict an electro-mechanical behavior of MEMS microphone. Then we fabricated the well-designed MEMS microphone with using micromachining technique. The fabricated MEMS microphone was consisted with low stress poly-silicon membrane and electroplated back-plate. The simulation of sensitivity and frequency response of packaged MEMS microphone was carried out. The simulation results show the acoustic sensitivity of -40.91 dB and the cutoff frequency of 79.4 kHz, respectively.
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