Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating**Project supported by the National High Technology Research and Development Program of China (Grant Nos. 2013AA031401, 2015AA016902, and 2015AA016904), the National Natural Science Foundation of China (Grant Nos. 61176053, 61274069, and 61435002), and the National Basic Research Program of China (Grant Nos. 2012CB933503 and 2013CB932904).

Abstract

We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13-channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refractive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickness of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick matching layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.