Abstract
• The integration of long-wave infrared detector with micro-metalens is proposed. • A polarization-independent and wide-band metalens is designed to use as the light concentrator. • The fabrication process of the metalens that is compatible with general MEMS process is developed. • The focusing effect of the designed metalens has been demonstrated successively. Infrared imaging technology has been a worldwide research focus with various significant applications in the military and surveillance fields. Due to the complicated structure of the infrared imaging element, the photosensitive area only occupies quite a small part of each element, resulting in a low fill factor and thus limited utilization efficiency of incident light. By integrating a polarization-independent, wide-band focusing metalens into the imaging element of the long-wave infrared detector, the effective fill factor can be significantly improved. The monochromatic focusing efficiency of the metalens is up to 86%, and the average focusing efficiency in the wide spectral from 8 µm to 14 µm reaches 80%. The focusing measurement results demonstrate that the fabricated metalens can be used as a light concentrator to improve the detection sensitivity. The micro-optical metalens is flat and ultra-thin shaped, which is composed of sub-wavelength silicon pillars. Due to its compatibility with the detector manufacturing process, the metalens can be scaled up for a large micro-metalens array monolithically integrated with an infrared focal plane array(FPA).
Published Version
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