Design and Fabrication of Mems U-Shaped Cantilever

Abstract

MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal.This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.