Design and fabrication of macroscopic piezoelectric actuators based on thick PZT films

Abstract

Abstract Large area piezoelectric actuators have been fabricated using sol gel PZT films of up to 20 μm in thickness. The dielectric, ferroelectric and piezoelectric properties have been measured and they are consistent with literature values. Simple vibrational structures have been fabricated based on both planar and coaxial substrates. At the resonant frequency, millimeter vibrations are observed. A PZT ‘In-Line Fiber Optic Modulator’ has been developed by coating a single mode optical fiber with a sol-gel film. Phase shifts of 2° are observed at 100 kHz for a 3 kV/cm electric field.