Abstract
Introducing interleaved carbon barrier layers improves the heat-resistance of Mo/Si multilayers. The soft X-ray reflectivities of the multilayers were calculated, and the effects of heating on both the reflectivities and layer structures of Mo/Si multilayers with and without barrier layers were investigated using X-ray diffraction and transmission electron microscopy. The results show that, for applications using intense soft X-ray beams, Mo/Si multilayers with interleaved carbon barrier layers are better mirrors than Mo/Si multilayers because they have much better heat resistance and almost the same soft X-ray reflectivity as the Mo/Si multilayers.
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