Abstract
Integrated flexible parylene-based MEMS inductors were successfully designed, fabricated and analyzed. By elctrodeposition technique, Ni 80 Fe 20 Permalloy with high permeability was acquired as the magnetic core to increase the inductance and quality factor of inductors. Using parylene as substrates, these inductors became more flexible and biocompatible. For small scale inductors, by HFSS simulation, a maximum quality factor of 51.52 was achieved at 3.10GHz. The inductance of inductors with magnetic core was enhanced by 3.3% than those with air core. As the width of the core increased from 25µm to 100µm, the inductance was also increased by 11.3% maximally. For large scale inductors fabricated, the tested maximum quality factor was 110 at 6MHz. Based on the IC compatible fabrication process, these inductors could be used in wireless power transmission system for implantable medical devices.
Published Version
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