Abstract
A new process concept and experimental results of making optical scanning mirrors with large mirror size and deflection angle are presented in this paper. Stepped vertical comb drive actuators and thinned torsion springs are used to enlarge the maximum deflection angle under the relatively low voltage load. The electrochemical etching technology is applied to release the epitaxial Si layer to serve as the micromirror plate. Preliminary results of both one-dimensional (1D) and two-dimensional (2D) optical scanning epi-Si mirrors are presented. The non-linear vibration behavior is observed and the related background phenomena are illustrated in details. The dynamic optical scanning angle is measured as large as ±30.4° (i.e., the ±15.2° of mechanical deflection angle) under 40 V pulse load of electrostatic excitation for mirror devices with stepped comb finger electrodes, a 1500 μm×1500 μm×27 μm mirror plate, and 400 μm×10 μm×22.5 μm torsion springs.
Published Version
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