Abstract
A symmetric two-dimensional (2D) periodic structure for antireflection coating applications is investigated in detail, based on the effective medium theory. The surface-relief patterns are designed and fabricated on silicon wafers, using binary optical processing methods. The structured surfaces with symmetric patterns as single homogeneous antireflective coatings. The significant improvement of transmittance with structured surfaces is observed at 10.6 /spl mu/m long-wavelength infrared region.
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