Abstract
In this paper, we have proposed a polymer-based photonic crystal (PhC) resonator, with multiple sizes of cavities, and a waveguide to be used as highly sensitive optical sensor components. Properties of the proposed PhC were simulated by the finite-difference time-domain method, and the polymer-based PhC resonator and waveguide were fabricated on a photoresist (polymer) by electron beam lithography, which was prepared on an Au-layer-deposited Si substrate. We detected the resonant light that penetrated through the waveguide and was trapped in the PhC resonator. Optical characteristics of the fabricated PhC were evaluated by detecting the polymer layer deposition process by using the layer-by-layer (LbL) method to deposit polymer layers. As a result, by using an optimized design of a polymer-based PhC resonator with a long cavity (equivalent to a defect of three holes), the PhC structure changes caused by LbL deposition lead to changes in resonant light wavelength (peak shift: 5.26 nm/layer). Therefore, we suggest that a PhC resonator and a waveguide is applicable as an optical sensor.
Highlights
Photonic crystal (PhC) is a periodically dielectric nanostructure that has attracted significant interest recently because of its unique optical properties
For observing the PhC resonator and waveguide fabricated by electron beam lithography (EBL), a Field emission scanning electron microscope (FE-SEM) (JSM-7610F, JEOL Ltd., Tokyo, Japan) was used
Considering the impracticality of PhC fabrication without a substrate as in the simulation demoCnostnrsaitdeedrianbgovthee, wimepsriamctuiclaaltietdy othfePehfCfecfat borficfaotiuorndwififtehroenutt asusbusbtrsattreasteSai,s Ainu,thAegs,imCuu,laatinodn cdoemmpoanrsetdratthede ealbeocvtrei,cwfieelsdiminutleantseidtiethse[2e6ff]e. ct of four different substrates Si, Au, Ag, Cu, and compared the eTleocternichfianelcde itnhteenesffiitcieiesn[c2y6]o. f light confinement at the resonator, a number of point defects was simulTaoteedn.hBaynvcaertyhiengeftfihceiennucmy boefrliogfhptocionntfidneefemctesnftroatmth1etore5soinnathtoer,siamnuulmatiboenr,owf epioninvet sdtiegfeactetsdwthaes isnifmluuelnacteeds.oBnythveareyleincgtritchfeienludminbteernosiftypoaitntthdeePfehcCtsrfersoomna1totro. 5 in the simulation, we investigated the influences on the electric field intensity at the PhC resonator. 22..33
Summary
Photonic crystal (PhC) is a periodically dielectric nanostructure that has attracted significant interest recently because of its unique optical properties. A PhC resonator realized by introducing point defects into the PhC can contribute to the trapping and amplification of light within the PBG range. Based on these features, the PhC resonator is reported to function in various fields, such as nanolaser development [12] and quantum information processing [13]. To fabricate a Si-based PhC, the widely utilized methods for drawing patterns are electron beam lithography (EBL) and reactive ion etching (RIE) These methods require highly costly apparatus and sophisticated fabrication processes. We propose the design and fabrication of a polymer-based PhC resonator and waveguide for optical sensor applications. Chemical sensing characteristics were evaluated by detecting the polymer layer deposition process using the layer-by-layer (LbL) method [25]
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