Abstract
The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrated electrostatic push-pull actuator and a SU-8 rib waveguide with a large core cross section (4 μm in height and 20 μm in width) in broadband single mode operation (λ = 0.4 μm to 0.65 μm). We have successfully demonstrated a 2D scanning motion using non- resonating operation with 201 Hz in vertical direction and 20 Hz in horizontal direction. This non-resonating scanner system has achieved a field of view (FOV) of 0.019 to 0.072 radians in vertical and horizontal directions, with the advantage of overcoming its frequency shift caused by fabrication uncertainties. In addition, we observed two fundamental resonances at 201 and 536 Hz in the vertical and horizontal directions with corresponding displacements of 130 and 19 μm, or 0.072 and 0.0105 radian field of view operating at a +150 V input. A gradient index (GRIN) lens is placed at the end of the waveguide to focus the diverging beam output from the waveguide and a 20 μm beam diameter is observed at the focal plane. The transmission efficiency of the waveguide is slightly low (~10%) and slight tensile residual stress can be observed at the cantilever portion of the waveguide due to inherent imperfections in the fabrication process.
Highlights
Modern day micro-scale imaging and display systems utilizes miniature scanner technologies for capturing images and displaying high density information in a small working environment
Virtual displays found in head-mounted displays (HMD) systems uses scanners to display large amount of information in a small display area for augmented reality/virtual reality applications [10,11,12,13,14]
Most of the miniature scanner system utilizes MEMS scanning mirrors, which requires the mirrors and the deflecting components to be significantly larger than the input beam diameter to avoid clipping or creating additional diffractions at the output
Summary
Modern day micro-scale imaging and display systems utilizes miniature scanner technologies for capturing images and displaying high density information in a small working environment. Advanced imaging systems, such as scanning confocal microscopy use micro scale scanners for real-time sub-cellular resolution imaging [1,2,3,4]. Portable video projection systems use miniature scanners for displaying high resolution contents with a light-weight form factor and low power requirement. Most of the miniature scanner system utilizes MEMS scanning mirrors, which requires the mirrors and the deflecting components to be significantly larger than the input beam diameter to avoid clipping or creating additional diffractions at the output. Iinngthseecftoiollno,wwinegwsiellctfiiorsnt, ewxaemwinilel tfhirestdeexsiagmniannedthoepedreastiiognnaal npdrinocpiperleastioonf athl ips rninovciepllsecsaonfnethr itshrnoouvgehl fiscnainteneelremtheronut ganhafliynsiitse (eFlEeAm)eunstinangaAlyNsiSsY(SFE(AAN) SuYsiSn,gCaAnNonSYsbSu(rAg,NPSAY.,SU, SCAan),oCnosvbeunrgto,rPWAa.r,eUaSnAd)R, sCooftv(eRnStoorfWt DaerseiganndGrRosuopf,t I(nRcS.,oOftsDsiensiinggn, GNrYo,uUpS, AIn)c.f,oOllosswineidngb,yNaYd, eUscSrAip)tfiolnloowfetdhebfyabardiceastciroinptpiornocoefssthaenfdabreriscualttisonfropmroctehses oapntdicraelspuelrtsfofrrmomantchee. optical performance
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