Abstract
This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width) to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm) with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input). A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5mm beam diameter is observed at the focal plane. The transmission efficiency is low (~10%) and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.
Highlights
In recent years, miniature scanner technologies, including micro-electro-mechanical system (MEMS) scanners, have started to appear on the market
This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner
This paper presents our improved waveguide scanner system, using a fully integrated MEMS-based push-pull actuator
Summary
Miniature scanner technologies, including micro-electro-mechanical system (MEMS) scanners, have started to appear on the market. Miniature scanner technologies have been employed in 1) scanning confocal microscopy, a powerful optical imaging method that can achieve sub-cellular resolution in real time [1-4], 2) portable, lightweight, low-power, inexpensive projection video displays with high information content [5-9], and 3) near-eye virtual displays like head-mounted displays (HMD) [10-14]. Most miniature scanner technologies utilize MEMS scanner mirrors. Mirror-based scanners are impractical for large angle beam deflection because mirror scanners and grating deflectors must be significantly larger than the source light beam diameter to avoid beam clipping or adding diffraction. Reducing the diameter of a conventional display device reduces the possible number of pixels, and reduces the resolution and/or field of view (FOV) of the device
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