Design and experimental study of the biorthogonal linkage laser self-mixing angle sensor

Abstract

In order to make up the defects of low-resolution and narrow measurement range ubiquitous in the current angle-measurement method, a biorthogonal linkage laser self-mixing angle sensor is designed for the micro-radian angular measurement over the full-circle range by taking the Acrylonitrile–butadiene–styrene resin as the material and adopting the 3D printing technology. The experimental results are in excellent agreement with the theoretical values, of which implies that the tool is capable of measuring the angle with effectively and accurately. Furthermore, the deviation degree between the measured and actual angle, and the experimental error are further investigated and discussed. As a result, this self-mixing angle sensor can greatly improve the angle measurement accuracy and reduce the experimental error rate. In the case of different rotating angles of 250 and 500 μrad, which corresponding to the angular resolution is better than 29.53 μrad and the relative error can be smaller than 3.18×10−4 %.