Full-circle range and microradian resolution angle measurement using the orthogonal mirror self-mixing interferometry.

Abstract

The self-mixing technique based on the traditional reflecting mirror has been demonstrated with great merit for angle sensing applications. In order to solve the problems of the narrow measurement angle range and low resolution in traditional angle measurement method, we proposed an angle measurement system using orthogonal mirror self-mixing interferometry combine an orthogonal mirror with designed mechanical linkage. It overcomes the shortcomings of traditional angle measurement methods and realized the angle measurement with microradian resolution in a full-circle range of 0 rad to 2π rad. In the experiment, the measurement resolution can reach to 5.27 µrad and the absolute error can lower to ± 0.011µrad, which satisfies the requirements of most high accuracy angle measurement.