Abstract
The output signal of traditional cantilever accelerometers usually overlapping and tailing during the high-velocity penetration process. And the sensitivity of traditional cantilever accelerometers cannot satisfy the application of multi-layer target penetration, that process contains large length-to-diameter ratios and high velocities. This paper proposes a novel high-impact Micro-Electro-Mechanical-System (MEMS) ceramic sandwich accelerometer (HMCSA) for the measurement of penetration-overload signals. Firstly, the HMCSA structure was designed and its structure-sensitive model was established. Then, the filling material in HMCSA was selected and the structure was simulated in ANSYS/LS-DYNA software. After that, the structure MEMS processing was introduced and the monitoring system was designed. Finally, the multi-layer target penetration process was simulated and HMCSA was tested in lab environment. The experiment verified that the design and manufacture of HMCSA was correct, and HMCSA can detect 30 000g acceleration.
Highlights
Micro-Electro-Mechanical-System (MEMS) inertial sensors improve obviously in this decade [1]–[4]
This study focus on the solution of the signal overlap problem, and a novel high-impact MEMS ceramic sandwich accelerometer (HMCSA) is proposed to obtain the reliable penetration signal data
The measurement accuracy of HMCSA structure can be improved under high-overload conditions by the following two steps: First, the above equations express that thinner electric layer achieves higher structure sensitivity
Summary
Micro-Electro-Mechanical-System (MEMS) inertial sensors improve obviously in this decade [1]–[4]. The algorithms usually extract of the overload envelope of the complex signals of multi-layer penetration using high-frequency filtering, modal decomposition, and overload threshold recognition. This study focus on the solution of the signal overlap problem, and a novel high-impact MEMS ceramic sandwich accelerometer (HMCSA) is proposed to obtain the reliable penetration signal data. Compared with the normal cantilever accelerometers, HMCSA employs capacitive detection method and has higher vibration frequency It can obtain high-frequency penetration signals effectively and the low-frequency interfering signals can be restricted by filter. When the impact penetration inputs, the relationship between the variable capacitance and the maximum deflection of the upper polar plate can be expressed as follows: C (P). The effective area of the polar plates should be large enough, and the thickness of the dielectric layer should be as small as possible to make the HMCSA structure as small as possible
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