Abstract
A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electro-statically actuated and sensed at resonance using comb electrodes. The device is fabricated using MEMS bulk-silicon technology. We analyze the single-stage micro-lever, and give out the key points of designing the micro-leverage mechanisms. The relationship between the sensitivity of accelerometer and each structure parameter were analyzed by the theory method. The result shows that the sensitivity of the accelerometer is about 33Hz / g.
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