Abstract
Green House Gases (GHGs) such as ground-level ozone are an important component of smog. In addition to destroying health and crops, it has an impact on climate change and the mortality rate of humans. It is known to cause over 150,000 pre-mature deaths every year and millions of cases of chronic diseases particularly in children and elderly. In this light, the efficiency of MEMS based Ozone Gas Sensor is an important parameter to be optimized. This paper illustrates the design, simulation, and evaluation of a micro-heater that is a vital component of the gas sensor. Simulations suggest that the meander spiral geometry offers a better temperature distribution over the sensor surface, thereby increasing the sensor contact area. 83.75 K/V is the sensitivity of the structures compared, 4 times more than the single meander and 1.5 times more than the double meander and spiral geometries.
Published Version
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