Abstract
Metal or semiconductor nanoparticles (NPs) can enhance the device performance of gas sensors due to their high surface area and unique electronic properties. However, this method requires additional thermal bonding with high temperatures to secure the NPs, making it unsuitable for flexible substrates. In this study, we develop a room-temperature flexible ozone (O3) gas sensor using Mn3O4 NPs on an amorphous InGaZnO (a-IGZO) film. The Mn3O4 NPs are synthesized by a successive ionic layer adsorption and reaction (SILAR) method at low temperatures. The sensor with Mn3O4 NPs exhibits a gas response of 4.06 against 5 ppm O3 gas at room temperature, which is much higher than that of its pristine counterpart. It also shows excellent selectivity for O3 over toxic gases and maintains stability over 60 days, with reproducible folding even after 500 bending cycles. Thus, the combination of SILAR-synthesized Mn3O4 NPs and a-IGZO films provides an effective way to fabricate flexible O3 gas sensors.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
