Design and Evaluation of Compliant Modular XY Positioning Stage

Abstract

ABSTRACT In precision engineering applications, compliant micropositioning stages with properties of long travel range, high accuracy and compact size are desirable. The majority of the existing research efforts are focused on monolithic compliant positioning stages with above merits. However, the monolithic stages possess a major drawback that failed components cannot be replaced and it requires time-costly machining process, i.e. wire electric discharge machining. To overcome these drawbacks, the stage using the concept of modular design with parallelogram flexure module is proposed. In the modular design, failed components can be easily replaced. The stage is driven by large range voice coil actuators (VCA). The static and dynamic analytical models based on stiffness matrix method are adopted for evaluating the performances of the stage. The accuracy of analytical models is validated by FEA results. Finally, experimental test is carried out to evaluate the performance. The stage provides translational motion of ± 5 mm along working direction and limited cross axes coupling of 10m in other direction for nonlinear behaviour. The proposed stage has resonant frequency of 15 Hz. The results obtained validate similar static and dynamic performances and trajectory tracking capabilities of the modular micro-positioning stage as that of monolithic stage.