Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide

Abstract

We present the design and experimental demonstration of the ultra-high-Q-factor silicon microring resonator based on a multi-mode ridge waveguide. The multi-mode ridge waveguide is designed to decrease the propagation loss and to improve the Q factor. The ultra-high Q factor of 1.1×106 is experimentally demonstrated, with the free spectrum range of 0.208nm. The single-mode ridge waveguide is used in the coupling region to reduce the dimension of the microring resonator, and the bend radius is only 20μm. To precisely control the resonance wavelength, a small heater is implemented on the silicon microring resonator with the tuning efficiency of 7.1 pm/mW. The degenerate four-wave mixing of the silicon microring resonator is investigated, and the conversion efficiency is measured to be -15.5 dB without optimizing the dispersion of the microring resonator and carriers extraction.