DESIGN AND CHARACTERIZATION OF VARIOUS SHAPES OF MICROCANTILEVER FOR HUMAN IMMUNODEFICIENCY VIRUS DETECTION

Abstract

The ability to detect pathogenic relevant molecules in the human body with high sensitivity and specificity has a powerful opportunity in early diagnosis and treatment of diseases. This paper presents the design, analysis and simulation of MEMS microcantilevers with various shapes like rectangular, triangular, V-shape and T-shape (Paddle) for one HIV detection with mass 10 -18 Kg which produces force of 9.81x 10 -18 Newton, To analyze the sensitivity of microcantilever , SiO2 material is used. The simulation of these designs is performed by Comsol Multiphysics. The change in total displacement of a microcantilever with respect to change in its shape for the same applied force is observed. From the analysis performed T-shape (Paddle) cantilever with length 1000µm, width 100 µm, thickness 0.5 µm with paddle length 500 µm, width 100 µm and thickness 0.5 µm produces maximum displacement of 3.24 x10 -07 µm. By this obtained deflection, using recent advanced read out systems the disease can be