Abstract

AbstractIn this paper, the performance of a 10‐μm‐elevated low‐loss and low‐dispersion elevated coplanar waveguide (ECPW) is presented. It is shown that a wide range of characteristic impedances, encompassing the 40–100Ω range, is obtainable. A very low effective dielectric constant (close to 1) is predicted based on the 3D finite‐difference time‐domain (FDTD) method and confirmed by measurement. The overlapped configuration on standard silicon reveals the best performance, with a loss of about 0.2 dB/mm, which is much lower than that of a conventional CPW at 40 GHz. © 2003 Wiley Periodicals, Inc. Microwave Opt Technol Lett 39: 169–171, 2003; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.11159

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