Design and characterization of a thermally actuated latching MEMS switch for telecommunication applications

Abstract

This paper describes the design and characterization of a thermal actuator and a latching MEMS switch, using the actuator. The proposed MEMS switch is designed for applications in telecommunication, in which it could be an alternative solution for the now existing electromagnetic relays for automated distribution frames. A MEMS-based switching matrix could be a very attractive solution as it can be made very compact, cost-effective, reliable and scalable. The actuators used in the switch use a polysilicon heater, which heats up the structure and causes deflection. The actuators were fabricated by using MetalMUMPs technology and measured results showed good agreement with the finite element results. Using these actuators, latching switches were also successfully fabricated. No energy is needed to stay in the open or closed state of the switch, which saves energy, but also keeps the interconnection state of the switching matrix in case of a power failure. The time- and current-dependent switch resistance was also measured and remained below 1.52 Ω after 105 latching cycles. The proposed switches could be very useful in a switching matrix for an automated distribution frame.