Abstract
In this paper a high capacitance ratio and low actuation voltage RF MEMS switch is designed and fabricated for Ka band RF front-ends application. The metal-insulator-metal (MIM) capacitors is employed on a signal line to improve the capacitance ratio, which will not degrade the switch reliability. To reduce the actuation voltage, a low spring constant bending folding beam and bilateral drop-down electrodes are designed in the MEMS switch. The paper analyzes the switch pull-in model and deduces the elastic coefficient calculation equation, which is consistent with the simulation results. The measured results indicated that, for the proposed MEMS switch with a gap of 2 μm, the insertion loss is better than −0.5 dB and the isolation is more than −20 dB from 25 to 35 GHz with an actuation voltage of 15.8 V. From the fitted results, the up-state capacitance is 6.5 fF, down-state capacitance is 4.3 pF, and capacitance ratios is 162. Compared with traditional MEMS capacitive switches with dielectric material Si3N4, the proposed MEMS switch exhibits high on/off capacitance ratios of 162 and low actuation voltage.
Highlights
In today’s competitive wireless market, the compact, low cost, reconfigurable and multi-function radio frequency (RF) blocks is the main research focus
Compared to PIN diode or FET switches, an radio frequency micro-electromechanical systems (RF MEMS) switch possess many advantages, such as high isolation, low insertion loss and low or near-zero power consumption [3], and it is widely applied in reconfigurable antenna, tunable filter, phase shifting network and automatic test equipment [4,5]
Photolithograph negative glue was used to photoetching direct current (DC) bias lines pattern, electron beam evaporation Cr DC bias lines, stripped photolithograph negative glue, and 0.15 μm-thickness Si3 N4 is deposited on top of the bias lines
Summary
In today’s competitive wireless market, the compact, low cost, reconfigurable and multi-function radio frequency (RF) blocks is the main research focus. The radio frequency micro-electromechanical systems (RF MEMS) switch draws considerable attention owing to its attractive performance, as a key enabler for reconfigurable RF front-ends [1,2]. There are two important indices to measure the switch performance, Capacitance ratio and actuation voltage. A high capacitance ratio is beneficial to achieve high isolation and excellent RF performance, for example, in the application of the tunable filter, the capacitance ratio of the switch determines the adjustable range of the center frequency of the resonant unit in the tunable filter. The actuation voltage reflects the integration performance of the switch, which contributes to the monolithic microwave integrated circuit (MMIC) implementation
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