Abstract
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than commercial AFMs. The new scanner concept is based on flexures that decouple the axes of motion and clamp the actuators on both sides in order to shorten the mechanical path lengths to a functional minimum. The positioner is designed for high mechanical resonance frequencies by optimizing the structure using finite element analysis. The implementation of the new system offers imaging capabilities of several thousand lines per second with a scanning range of 13 micrometers in both scanning directions, and the freedom to rotate the image.
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