Abstract

This article presents the results of some experiments on the further improvement in the sensitivity of uncooled microbolometers in the terahertz range via depositing an additional thin metallic absorbing layer on a microbolometer membrane. The experiments have shown the mentioned modification of the microbolometer design increase its sensitivity several times. A strong dependence of the microbolometer sensitivity on the angle of polarization of terahertz radiation has been revealed. It has been shown that the microbolometer responsivity in the terahertz range is caused by the absorption of radiation in the narrow metallic bus going along the microbolometer legs as well as in the strips acting as an ohmic contact with the thermally sensitive layer

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