Design and analysis of serially coupled double microring resonator based force sensor for 1 μN range measurement

Abstract

We report the design and analysis of a serially coupled double microring resonator based force sensor for 1μN range measurement. The change in the applied force can be monitored by change in the resonant wavelength shift at drop port of the double microring resonator. The current force sensor can measure the force range of 0–1μN. The estimated resonant wavelength shift is 0.1nm per 1μN force. This force sensor provides large FSR of 114nm, low FWHM of 0.08nm and high Q-factor 19,000 compared to the force sensor based on single microring. This proposed device can be employed for sensing smaller forces in aerospace, automobile and other harsh environmental applications. This sensor can also be used as displacement, pressure sensor and accelerometer by appropriate change in the design.