Abstract

Tremendous advancement in the field of Radio-frequency were developed through Micro-fabrication techniques, these technologies miniaturize device in a micro-scale behavior for improved device performances. These technologies are developing rapidly due to its distinct features and wide usage in various applications ranging from switches to sensing devices. The principal behind this work is to build a MEMS based Reconfigurable DMTL phase shifter based on RF MEMS switch with improved device phenomenon like switching speed, low actuating voltage, losses and stress factors. The RF switch is build in a series behavior through co-planar waveguides. Generally switching speed is a major concern in RF MEMS devices because of the presence of the actuating elements within the structure which in turn hinders the device ability to function. The phase shifter designed helps in improving the overall switching speed of the device without electrical or dimension alternation of the device. In this paper, we are implementing a PUSH PULL based RF MEMS reconfigurable switch which was structurally altered based on triangular cantilevers in order to enhance the device switching speed. This would develop and enable better application in terms of reconfigurable phase shifter which can be operated at the wider bandgap applications. Even the resonant frequency enhancement was made which provokes an increase of 13% in terms of the switching speed.

Highlights

  • In the growing technological standards, the Micro-electro-mechanical system (MEMS) had grown to a larger extent making itself feasible for wide range of applications ranging from switches to that of sensing device

  • The RF MEMS switch been integrated with distributed MEMS transmission line shifter (DMTL) phase shifter is actuated through electrostatic forces which is in turn explained based on the concept of parallel plate capacitors, where one of the end is moving and the another is fixed

  • This work provokes about the RF MEMS switch which is integrated with the DML shifter

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Summary

Introduction

In the growing technological standards, the Micro-electro-mechanical system (MEMS) had grown to a larger extent making itself feasible for wide range of applications ranging from switches to that of sensing device These include the accelerometers, sensor gradient devices and other switching devices like RF, trigger based etc. The proposed RF MEMS switch are build using a triangular configuration These triangular shaped structure acts as the transmission waveguide which is interfaced between the input and the throughput systems, this in turn enhances the charge flow and improves the parameters like the switching speed and resonant frequency ranges. In this configuration, the weight of the switch is very minimal which helps in achieving better switching speed. In this stress factor are induced through creating a hole in the centre of the mechanical structures which evens up the stress factor and helps in reducing the potential voltage needed to actuate the switch

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