Design and analysis of an elliptical-shaped linear ultrasonic motor

Abstract

A linear ultrasonic motor (LUSM) with an elliptical-shaped metallic stator and two orthogonal vibration modes is presented in this research. The driving tip’s desired vibration is generated by the excitation of two piezoelectric actuators installed inside the stator by two sinusoidal voltages with ±π2 phase difference. The working principle of the motor is described and mathematically formulated. Furthermore, finite element analysis and parametric optimization are performed to finalize the motor design. A prototype of the motor is fabricated and evaluated by identification and operation tests. The experimental and numerical characteristic curves of the motor are presented and compared. Based on the experimental results, the prototype has a no-load speed of 40 mm/s and maximum thrust force of 1.55 N under excitation voltage of 70 Vp and preload of 12 N.