Design and Analysis of an Abbé Free Coplanar Stage

Tien-Tung Chung,Ching-Siong Lim Chan,Teng-Hui Tseng,H.L Yuan,P Tandon,R.K Agarwal,E.X Wang

doi:10.1051/matecconf/20179507017

Abstract

Design and analysis of a new Abbe free coplanar xy stage are presented in this paper. The xy stage is formed as conventional xy stages which combine with two stacked up linear guides. The x-guide is on the bottom and the y-guide is on top of the x-guide. The travel range of this xy stage is 300mm × 300mm, which fits dimensions of 12-inch wafers. A special mechanism is designed such that the z-surface of the y-guide has the same height as the z-surface of x-guide, and the Abbe error and cumulative error of this coplanar stage can be reduced. The concept of symmetric structure design is also considered to eliminate the structural deformation due to driving force of two guides. For this long travel range precision stage, the finite element method (FEM) is applied to analyze the structural deformation and vibration natural frequencies. The requirement of structural deformation due to self-weight load is limited to 1.5μm, and first natural frequency is limited to over 100 Hz.

Highlights

Precision positioning technique is important in the development of science and technology
This paper proposes a design of the coplanar XY stage to reduce the accumulation of geometric errors and Abbé error
The coplanar stage developed in this paper contains several advanced design methods, including Abbé free concept and coplanar concept

Summary

Introduction

Precision positioning technique is important in the development of science and technology. The positioning stages with high accuracy is required in various fields such as semiconductor manufacturing, precision machining, precision measurements, etc. The traditional configuration of stacked up type stages has disadvantages of large assembly errors and geometry errors, such as Abbé error. Stacked up type stages reduce the motion stability and accuracy for positioning. This paper proposes a design of the coplanar XY stage to reduce the accumulation of geometric errors and Abbé error. The coplanar stage developed in this paper contains several advanced design methods, including Abbé free concept and coplanar concept. The laser interferometric measurement is free from Abbé errors of the first order in all the three xyz coordinates [3]

Coplanar XY stage design

Finite element analysis

Summary