Abstract
The delivery and distribution of fluid have wide applications in biomedicine, the fine chemical industry, pharmaceutical research, and other fields. However, existing fluid delivery and distribution systems often suffer from issues such as large size, excessive noise generation, and high-power consumption, rendering them unsuitable for convenient applications. Here, a wheel-shaped valve piezoelectric micropump with a size of only 10 mm*10 mm*1 mm is proposed and a prototype is prepared. The vibration mode, operating principle, and the liquid flow of the micropump are analyzed by finite element method. The output liquid (distilled water) flowrate of the pump is approximately 15 mL/min, and the maximum pump distilled water pressure can reach 100 KPa. The results indicate that the performance of the micropump is consistent with the analysis results, which shows its potential application in the field of portable devices and medical.
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