Abstract
The purpose of this study is to design and analyse a novel six-degrees-of-freedom (DOF) precision positioning table, which is assembled by two different kinds of three-DOF precision positioning tables: a plane-type three-DOF ( X, Y, θ z) precision positioning table and a cylinder-type three-DOF (θ x, θ y, Z) one, and each table is driven by three piezoelectric actuators (PAs). In this paper, the Bouc—Wen model is employed to describe the hysteretic phenomenon of the PAs. The transfer matrices with cross-coupling terms between the output displacements and input voltages are derived from the dynamic equations in the steady-state conditions. In order to obtain the best transfer matrix, experimental measurements of the whole six-DOF table are compared with those from the two individual three-DOF precision positioning tables. Finally, the transfer matrices with better performance for the two three-DOF tables and the novel six-DOF table are obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
