Abstract
Flexure-based micropositioning stages with high positioning precision are really attractive. This paper reports the design and analysis processes of a two-degree-of-freedom (2-DOF) flexure-based XY micropositioning stage driven by piezoelectric actuators to improve the positioning accuracy and motion performance. First, the structure of the stage was proposed, which was based on rectangular flexure hinges and piezoelectric actuators (PZT) that were arranged symmetrically to realize XY motion. Then, analytical models describing the output stiffness in the XY directions of the stage were established using the compliance matrix method. The finite element analysis method (FEA) was used to validate the analytical models and analyze the static characteristics and the natural frequency of the stage simultaneously. Furthermore, a prototype of the micropositioning stage was fabricated for the performance tests. The output response performance of the stage without an end load was tested using different input signals. The results indicated that the stage had a single direction amplification capability, low hysteresis, and a wide positioning space. The conclusion was that the proposed stage possessed an ideal positioning property and could be well applied to the positioning system.
Highlights
Micro/nanopositioning technology is essential for various applications in many research and technical fields, such as microelectromechanical systems (MEMS), ultra-precision machining and measurement, micro-assembly, biological processes, manipulation, and other applications [1,2,3,4,5,6,7,8].For a scanning system, a parallel kinematic piezoelectric actuator (PZT) XYZ scanner was proposed, which could achieve high bandwidth and low coupling errors [9]
The piezo-actuated XY stage with integrated a parallel, decoupled, and stacked kinematics structure was used for micro/nanopositioning applications and a novel flexure-based XY micropositioning stage driven by electromagnetic actuators with high moving range and resolution was produced [14,15]
A 2-DOF flexure-based differential XY micropositioning stage driven by piezoelectric actuators was proposed in this study
Summary
Micro/nanopositioning technology is essential for various applications in many research and technical fields, such as microelectromechanical systems (MEMS), ultra-precision machining and measurement, micro-assembly, biological processes, manipulation, and other applications [1,2,3,4,5,6,7,8]. A parallel kinematic piezoelectric actuator (PZT) XYZ scanner was proposed, which could achieve high bandwidth and low coupling errors [9]. Sci. 2020, 10, 8336 flexure-based mechanism with three degrees of freedom driven by three piezoelectric actuators focused on achieving kinematics with X-direction motions decoupled from those in the Y- and θ-directions [13]. The piezo-actuated XY stage with integrated a parallel, decoupled, and stacked kinematics structure was used for micro/nanopositioning applications and a novel flexure-based XY micropositioning stage driven by electromagnetic actuators with high moving range and resolution was produced [14,15]. Based on the aforementioned analysis, to improve the performance in terms of the accuracy and motion of the positioning stage, a novel differential drove two-dimensional positioning stage was designed and analyzed in this paper.
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