Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage

Tao Jin,Junjie Wu,Lihua Lei,Bo Zhang,Siwei Luo,Yanfen Le

doi:10.1177/16878140211014061

Abstract

In order to solve the low coupling displacement and high crosstalk error of multi-dimensional micro-displacement stage, a two-dimensional micro-displacement stage based on flexure hinges and piezoelectric ceramics is designed and analyzed. The whole stage adopts a nested parallel structure. The design parameters of flexure hinges are calculated using Pseudo-rigid body model. Those parameters are confirmed by a simulation before manufacturing the stage. A double frequency laser interferometer is used for measuring the displacement and crosstalk error of the stage when it’s driven. The experimental results show that the maximum crosstalk error of the two-dimensional displacement platform within full travel is 0.98%, the displacement coupling rate approaches 91.4%, and the remaining trajectory deviation caused by hysteresis asymmetry can be reduced to 0.79%.

Highlights

Micro-displacement technology becomes one of the key technologies in the fields of ultra-precision machining, optical instruments, microelectronics, medical technology and so on.[1,2] Its displacement stroke and dynamic performance are very importance in the above researches
The results show the maximum crosstalk error of the two-dimensional displacement platform is only 0.98% within full stroke, the displacement coupling rate approaches 91.4%, and the remaining trajectory deviation caused by hysteresis asymmetry can be reduced to 0.79%
Compared with the travel of piezoelectric ceramics (3.8 6 15% mm), the stage arrived the maximum displacement of the ceramics

Summary

Introduction

Micro-displacement technology becomes one of the key technologies in the fields of ultra-precision machining, optical instruments, microelectronics, medical technology and so on.[1,2] Its displacement stroke and dynamic performance are very importance in the above researches. Keywords Flexible hinge, piezoelectric ceramics, nested structure, two-dimensional micro-displacement stage, low crosstalk error In order to solve the drawbacks of the above structures, a two-dimensional with inner and outer nested series mechanism piezoelectric micro-displacement stage is described.

Results

Conclusion