A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation

Abstract

A new 2-degrees of freedom compliant parallel micromanipulator (CPM) utilizing flexure joints is proposed for two-dimensional nanomanipulation in this paper. By a proper selection of actuators, flexure hinges, and materials, this system is constructed and analyzed by a pseudorigid-body model, architectural optimization, and finite-element analysis. Both the position and velocity kinematic modelings are established, and afterwards, statics analysis is performed. In view of the physical constraints imposed by pizeo-actuators and flexure hinges, the CPM's workspace area is determined. And in order to achieve a maximum workspace subjected to the given dexterity indices, kinematic optimization of the design parameters is carried out, which results in a manipulator satisfying the operational requirements. Furthermore, the finite-element analysis has been undertaken to validate the analytical modeling, and the influence of architectural parameters on CPM performance has been evaluated as well. Note to Practitioners-This paper is motivated by the problem of designing a nanomanipulator for two-dimensional (2-D) assembly of nanoscale objects via nanomanipulation. A novel planar parallel mechanism incorporating compliant mechanisms is designed for such a purpose. Since the application of the manipulator depends significantly on the kinematic mathematical models, the designed compliant parallel micromanipulator (CPM) is analyzed by the established pseudorigid-body (PRB) model. The architectural optimization leads to a CPM satisfying the workspace and resolution requirements of this work. Moreover, finite-element analysis is performed to verify the accuracy of the developed PRB model, and simulation results illustrate the efficiency of the PRB model in designing and analyzing the CPM. Since the designed CPM is composed solely of flexural elements which are known to be competent in high precise applications, it is reasonable to expect that the CPM could find its way into 2-D manipulation of nanoscale components.