Design and analysis of a 3-DOF micro-positioning compliant mechanism with hybrid orthogonal compliant elements

Abstract

The compliant mechanism plays an important role in the field of micro-positioning due to its excellent mechanical properties. In this work, we designed a hybrid compliant mechanism with three compliant elements, and the force is driven by the piezoelectric ceramic driver to drive the stage to rotate. The static simulation analysis of the compliant mechanism shows that the strain generated by the compliant element can satisfy the space rotation of the stage, and the compliant element will not be plastically deformed.