Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

Abstract

In this paper, an analytical method of resonant frequency, tuning range, the effective relative dielectric constant, and characteristic impedance is proposed, which is for coplanar waveguide (CPW) resonator loaded by defected ground structure (DGS) and micro-electromechanical systems (MEMS) capacitors. The analytical solution is achieved by an employing equivalent method. The resonant frequency, tuning range, and effective relative dielectric constant are obtained by the analytical solution. For verifying the effectiveness of the proposed method, a CPW tunable bandstop filter (BSF) with DGS and MEMS capacitors is designed, simulated, and fabricated, results show good effectiveness of the proposed analysis method. By changing the height of the MEMS beam with the actuation voltage, the designed BSF can switch the center frequency among three states (i.e. 18.5 GHz, 18.2 GHz, 17.5 GHz, respectively), and fractional bandwidth is changed as well (i.e. 37.8%, 45.6%, 49.5%, respectively).