Abstract

The “depth selectivity” can be expressed by weight functions T E, Θ ( x) giving the probability that electrons, starting in depth x, reach and leave the surface with an energy E, and an emission angle Θ relative to the surface normal. T E, Θ ( x) was available up to now only for K conversion electrons of iron in the energy range 6.3–7.3 keV. To extend the available depth range for 57Fe DCEMS, we calculated T E, Θ ( x) for energies down to about 2 keV, and up to 14.4 keV, including K, L and M conversion and KLL Auger electrons. Based on these results a program has been developed to simulate for a given sample composition DCEMS and also ICEMS spectra. First results of electron transport calculations for the 19.6 keV L conversion electrons of 119Sn indicate a reduced surface sensitivity in comparison to 57Fe, but the depth resolution seems to be reasonably good for deep layers.

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