Abstract
Abstract Depth profiles of Fe-Ti multilayer structure composed of 29 alternate Fe and Ti layers (68 and 84 A thick) were obtained by secondary ion mass spectrometry under 5.5 and 3 keV O2+ bombardment. The effect of oxygen flooding on the in-depth resolution and matrix effects was investigated. Without oxygen flooding during ion bombardment, induced roughness has been developed. With oxygen flooding at 10−5 Torr, the layers are easily visible, the depth resolution is constant with the depth and the Ti signal is representative of the composition profile in the multilayer sandwich (no matrix effects on Ti intensities).
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