Depth-profiling of beryllium on graphite with ion beams

Abstract

The surface layer of beryllium-coated graphite was analysed by backscattering and nuclear reaction methods using a 2.5 MeV accelerator. For the Be analysis the nuclear reactions 9Be(p, d) 8Be, 9Be(p, α) 6Li, 9Be(d, p) 10Be, 9Be(d, t) 8Be, 9Be(d, α) 7Li and 9Be( 3He, p) 11B are compared with backscattering of 4He + and protons. For the analysis of carbon, which provides complementary information to the depth profiling of Be, and for the analysis of oxygen, which is the third element of importance in the system, elastic backscattering of 4He + and protons is applied. It turns out that the backscattering analysis with protons of 1.3 MeV presents the best compromise for a quick and straightforward measurement of all three elements. The other methods have their merits for a more detailed analysis.