Abstract
Polycrystalline diamond films were deposited on molybdenum substrates by pulsed d.c. glow discharge chemical vapour deposition. A stable discharge with a methane in hydrogen mixture (0.5–7 vol.%) was maintained by the plasma generator over a wide range of power density (1–7 A cm −2). Deposition areas from 0.4 to 3 cm 2 were used and growth rates of more than 40 μm h −1 were achieved. The well-faceted diamond layers were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform IR (FTIR) spectroscopy.
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