Abstract
Oxygen-functional plasma polymers are of high interest in diverse fields such as, e.g., biomedical applications where stable surfaces are required, i.e., avoiding strong aging, leaching, and dissolution effects. Plasma polymer deposition from water vapor/acetylene mixtures is thus examined by varying energy input and gas ratio. Mainly, the latter was found to influence oxygen incorporation. Increasing the overall oxygen content in the plasma polymer films, however, results in film loss when immersed in water. Highly stable a-C:H:O films could be obtained for H2O/C2H2 gas flow ratio around 5 at moderate energy input. Such films mainly comprise COR groups as indicated by XPS and FTIR measurements.
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