Abstract
Evaporation rates of lead, titanium, zirconium and lanthanum thd-precursors and deposition rates of corresponding single oxides were measured by using a microbalance setup. Epitaxial-like PbTiO 3 thin films on MgO (100) substrates and heterostructures PbTiO 3/In 2O 3/MgO (100) were deposited by an aerosol source CVD technique.
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