Abstract
ABSTRACT RF plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) and SrTiO3 (STO) thin films. Optical emission spectroscopy was used for control of concentration of particles sputtered from the hollow cathode. Relation between ratio of spectral intensity of Ba, Ba+, Sr and Sr+ lines and ratio of Ba and Sr concentration in the deposited film was found. Deposited thin films were analyzed by XRD, which confirmed presence of BSTO perovskite phase in the films. All prepared films with high enough Ba concentration (0.5 ≤ x ≤ 0.9) revealed good shaped dielectric hysteresis loops typical for ferroelectric phase.
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