Deposition of Metal Oxide Films from Metal–EDTA Complexes by Flame Spray Technique

Abstract

R2O3 (R = Y, Eu, Er) metal oxides were synthesized from metal–ethylenediaminetetraacetic acid (EDTA) complexes using a flame spray technique. As this technique enables high deposition rates, films with thickness of several tens of micrometers were obtained. Films of yttria, europia, and erbia phase were synthesized on stainless-steel substrates with reaction assistance by H2–O2 combustion gas. The oxide films consisted of the desired crystalline phase with micropores. The porosity of the films was in the range of 6–15%, varying with the metal used. These results suggest that the true density of the metal oxide obtained from metal–EDTA powder through the thermal reaction process plays an important role in achieving film with the desired porosity.