Deposition of LaMO 3 (M=Co, Cr, Al) films by spray pyrolysis in inductively coupled plasma

Abstract

LaMO 3 (M=Co, Cr, Al) films were prepared on substrates by introducing ultrasonically atomized metal nitrate solutions into an inductively coupled plasma under atmospheric pressure (spray-ICP technique). Dense perovskite-type oxide films of LaCoO 3 and LaCrO 3 were obtained at 600–900°C, while the LaAiO 3 films consisted of loosely packed aggregates. Deposition rates of the films were 6–35 nm/min at 600–900°C. The high temperature phases (cubic) of LaCoO 3 and LaAlO 3 crystallized due to effect of grain size. LaCrO 3 film crystallized in the room temperature phase (orthorhombic). LaCoO 3 was highly oriented to (100) on MgO(100), and LaCrO 3 to (011) and (101) on sapphire(001). Lowest electric resistivities of LaCoO 3 and LaCrO 3 film on MgO were 9.8X10 -3 and 2.7X10 -1 Ω m, respectively, at room temperature.